Product | Silicon Wafer Platinum Coated | |
Stock No | NS6130-10-1152 | |
CAS | 7440-21-3 | Confirm |
Structure | Pt/TaOx on SiO2/Si wafer (4 inch) | Confirm |
Film | Pt/TaOx (Platinum on Tantalum Oxide) | Confirm |
Orientation of Film | (111) | Confirm |
Thickness of PT Film | 200nm (Sputtering method) | Confirm |
Thickness of TaOx Film | 40nm (Sputtering method) | Confirm |
Substrate | SiO2/Si Wafer | Confirm |
Thickness of SiO2 | 300nm (Thermal Oxidiation) | Confirm |
Silicon Wafer | Single Side Polished | Confirm |
Diameter | 4” (100mm) | Confirm |
Thickness of Si | 525 ± 20µm | Confirm |
Crystal Orientation | <100> | Confirm |
Type | P (Boron Doped) | Confirm |
Growth Method | CZ Prime | Confirm |
Resistivity | 1 ~ 10 Ὼ.cm | Confirm |
Quality Control | Each Lot of Silicon Wafer Platinum Coated was tested successfully | |
Main Inspect Verifier | Manager QC |