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Product | Silicon Wafer 4" | |
Stock No | NS6130-10-1197 | |
CAS | 7440-21-3 | Confirm |
Diameter | 4”(100mm) | Confirm |
Thickness | 500 µm (±25µm) | Confirm |
Dopant | Boron | Confirm |
Crystal Orientation | <111> | Confirm |
Type | p Type | Confirm |
Growth Method | CZ | Confirm |
Resistivity | 1 to 50 mΩ.cm | Confirm |
TTV | <10µm | Confirm |
STIR | <2µm | Confirm |
GLOBAL TIR | <5µm | Confirm |
LPD | <30 counts @ particles size>0.3µm | Confirm |
Surface Flatness | <1um (3mm degree exclusion) | Confirm |
Edge Profile | Rounded | Confirm |
Front Surface | Polished | Confirm |
Back Surface | Etched | Confirm |
Surface roughness | <5nm | Confirm |
Bow | 30µm | Confirm |
Standard Tolerance | ±0.5° | Confirm |
Quality Control | Each Lot of Silicon Wafer 4" was tested successfully | |
Main Inspect Verifier | Manager QC |