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Silicon/Cellulose Wafers
Platinum Coated Silicon Wafer
P-type/Boron doped with thermally grown SiO2 surface
Platinum Coated Silicon Wafer
Available Pack Size: 1Pc, 2Pcs, 5Pcs, 10Pcs & Bulk orders
Platinum Coated Silicon Wafer
| Product | Platinum Coated Silicon Wafer | |
| Stock No | NS6130-10-1179 | |
| CAS | 7440-21-3 | Confirm |
| Diameter | 4” (101.6mm) | Confirm |
| Crystal Orientation | <100> | Confirm |
| Deposit Layers: | . | |
| Titanium Dioxide (TiO2) | 400Å ± 50Å (Polished side) | Confirm |
| Silicon Dioxide (SiO2) | 1micron (0.50 micron on both sides of wafer) | Confirm |
| Platinum (Pt) | 1500Å ± 100Å (Polished side) | Confirm |
| Typical Pt Resistivity | 1-20 Ohm-cm | Confirm |
| Growth Method | CZ | Confirm |
| Resistivity | 15 Ω-cm (1-20) | Confirm |
| Surface | Single Side Polished | Confirm |
| Coating | Platinum | Confirm |
| Water Configuration | p-type Si + SiO2 + TiO2 + Pt | Confirm |
| Surface roughness | ≤ 5 Å | Confirm |
| Thickness of Platinum Layer | 150-200nm | Confirm |
| Grade | Prime | Confirm |
| Thickness of Si wafer | <500 μm | Confirm |
| RRG | ≤12 % | Confirm |
| Oxygen Contents | 12.5-16.5 ppma | Confirm |
| Carbon Contents | ≤1 ppma | Confirm |
| Shape | Cicular | Confirm |
| Quality Control | Each Lot of Platinum Coated Silicon Wafer was tested successfully | |
| Main Inspect Verifier | Manager QC | |
Expert Reviews
