Platinum Coated Silicon Wafer

P-type/Boron doped with thermally grown SiO2 surface
Stock No.
NS6130-10-1179
CAS
7440-21-3
MSDS
MSDS
Specifications
Specifications
COA
COA
Catalogue

Platinum Coated Silicon Wafer

Available Pack Size: 1Pc, 2Pcs, 5Pcs, 10Pcs & Bulk orders
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Platinum Coated Silicon Wafer
ProductPlatinum Coated Silicon Wafer
Stock NoNS6130-10-1179
CAS7440-21-3Confirm
Diameter4” (101.6mm)Confirm
Crystal Orientation<100>Confirm
Deposit Layers:.
Titanium Dioxide (TiO2)400Å ± 50Å (Polished side)Confirm
Silicon Dioxide (SiO2)1micron (0.50 micron on both sides of wafer)Confirm
Platinum (Pt)1500Å ± 100Å (Polished side)Confirm
Typical Pt Resistivity1-20 Ohm-cmConfirm
Growth MethodCZConfirm
Resistivity15 Ω-cm (1-20)Confirm
SurfaceSingle Side PolishedConfirm
CoatingPlatinumConfirm
Water Configurationp-type Si + SiO2 + TiO2 + PtConfirm
Surface roughness≤ 5 ÅConfirm
Thickness of Platinum Layer150-200nmConfirm
GradePrimeConfirm
Thickness of Si wafer<500 μmConfirm
RRG≤12 %Confirm
Oxygen Contents12.5-16.5 ppmaConfirm
Carbon Contents≤1 ppmaConfirm
ShapeCicularConfirm
Quality ControlEach Lot of was tested successfully
Main Inspect VerifierManager QC

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Platinum Coated Silicon Wafer

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